Design of a Piezoelectric Pump Driven by Inertial Force of Vibrator Supported by a Slotted Beam

This paper introduces the design, manufacture, dynamic analysis, and experimental results of a piezoelectric pump driven by inertial force vibrator supported slotted beam. The is composed mass block, displacement amplifier, beam fixed with both ends. In resonant mode, amplifier drives to work, produces amplitude force. this paper, design optimizes output amplifier. addition, supports increases elastic output. body adopts polydimethylsiloxane (PDMS) check valves compressible spaces improve performance. research studies influence stiffness on performance qualitatively analyzing vibrator. Nine kinds beams different stiffnesses blocks are designed for comparison. Thereafter, an optimal structure selected. show that under driving voltage 700 Vpp , maximum flowrate 441 mL min−1 back pressure 25.3 kPa.